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Journal of Applied Physics / Volume 99 / Issue 8 / PROCEEDINGS OF THE 50TH ANNUAL CONFERENCE ON MAGNETISM AND MAGNETIC MATERIALS / Magnetic Sensors (Not for Recording)

J. Appl. Phys. 99, 08B317 (2006); http://dx.doi.org/10.1063/1.2170067 (6 pages)

Progress toward a thousandfold reduction in 1/f noise in magnetic sensors using an ac microelectromechanical system flux concentrator (invited)

A. S. Edelstein1, G. A. Fischer1, M. Pedersen2, E. R. Nowak3, Shu Fan Cheng4, and C. A. Nordman5

1U.S. Army Research Laboratory, Adelphi, Maryland 20783
2MEMS Exchange, Reston, Virginia 20191
3Physics Department, University of Delaware, Newark, Delaware 19716
4Naval Research Laboratory, Washington, DC 20375
5NVE Corp., Eden Prairie, Minnesota 55344

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(Published online 27 April 2006)

The potential advantage of some magnetic sensors having a large response is greatly decreased because of the 1/f noise. We are developing a device, the microelectromechanical system (MEMS) flux concentrator, that will mitigate the effect of this 1/f noise. It does this by placing flux concentrators on MEMS structures that oscillate at kilohertz frequencies. By shifting the operating frequency, the 1/f noise will be reduced by one to three orders of magnitude depending upon the sensor and the desired operating frequency. We have succeeded in fabricating the necessary MEMS structures and observing the desired kilohertz normal-mode resonant frequencies. Only microwatts are required to drive the motion. We have used spin valves for our magnetic sensors. The measured field enhancement provided by the flux concentrators agrees to within 4% with the value estimated from finite element calculations. No difference was detected in noise measurements on spin valves with and without the flux concentrators. This result provides strong evidence for the validity of our device concept. Solutions to the sole remaining fabrication problem will be discussed.

© 2006 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. CONCEPT OF THE MEMS FLUX CONCENTRATOR
  3. DESIGN AND FABRICATION
  4. TESTING
  5. CONCLUSION

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KEYWORDS and PACS

Keywords

magnetic sensors, finite element analysis, spin valves, noise

PACS

  • 07.55.-w

    Magnetic instruments and components

  • 07.07.Df

    Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

  • 85.85.+j

    Micro- and nano-electromechanical systems (MEMS/NEMS) and devices

  • 02.70.Dh

    Finite-element and Galerkin methods

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.2170067

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    N. Giordano, Phys. Rev. B 53, 14937 (1996).

    V. Podzorov et al., Phys. Rev. B 61, R3784 (2000).

    L. Jiang et al., Phys. Rev. B 69, 054407 (2004).

    N. Smith and P. Arnett, Appl. Phys. Lett. 78, 1448 (2001)APPLAB000078000010001448000001.

    J. S. Moodera et al., Phys. Rev. Lett. 74, 3273 (1995).

    W. H. Butler et al., Phys. Rev. B 63, 054416 (2001).

    A. Jander et al., J. Appl. Phys. 93, 8382 (2003)JAPIAU000093000010008382000001.

    An earlier version of the device was described previously by A. S. Edelstein and G. A. Fischer, J. Appl. Phys. 91, 7795 (2002)JAPIAU000091000010007795000001.


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