Mechanics of hydrogenated amorphous carbon deposits from electron-beam-induced deposition of a paraffin precursor

Ding, W.; Dikin, D. A.; Chen, X.; Piner, R. D.; Ruoff, R. S.; Zussman, E.; Wang, X.; Li, X.

doi:doi:10.1063/1.1940138

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Structural transformation of Sb_xSe_100−x thin films for phase change nonvolatile memory applications

The structural transformation and transformation kinetics of SbxSe100−x films (60 ⩽ x ⩽ 70) were studied to investigate the feasibility of applying SbxSe100−x alloys in phase change nonvolatile memories. Temperature-dependent van der Pauw measurements, x-ray diffraction, x-ray reflectometry, and a static tester were used to determine the structure and transformation kinetics of the SbxSe100−x films. The sheet resistance difference between the amorphous and crystalline states was higher than 104...

Morphology control and material mixing by high-temperature organic vapor-phase deposition and its application to thin-film solar cells

Organic vapor-phase deposition is used to grow photovoltaic cells consisting of molecular compounds that require high-evaporation temperatures. The organic crystal size and film morphology are controlled by adjusting the source evaporation temperature, substrate temperature, carrier gas flow rate, and chamber pressure. The resulting surface morphology produces a highly folded donor–acceptor interface with a fourfold increase in area compared with a planar heterojunction, leading to an increased...

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at specific locations. In this work, electron-beam-induced deposition (EBID) has been used to deposit carbon films that are similar to those that have recently been used for clamping nanostructures. The film deposition rate was accelerated by placing a paraffin source of hydrocarbon near the area where the EBID deposits were made. High-resolution transmission electron microscopy, electron-energy-loss spectroscopy, Raman spectroscopy, secondary-ion-mass spectrometry, and nanoindentation were used to characterize the chemical composition and the mechanics of the carbonaceous deposits. The typical EBID deposit was found to be hydrogenated amorphous carbon (a-C:H) having more sp²- than sp³-bonded carbon. Nanoindentation tests revealed a hardness of ∼ 4 GPa and an elastic modulus of 30–60 GPa, depending on the accelerating voltage. This reflects a relatively soft film, which is built out of precursor molecular ions impacting the growing surface layer with low energies. The use of such deposits as clamps for tensile tests of poly(acrylonitrile)-based carbon nanofibers loaded between opposing atomic force microscope cantilevers is presented as an example application

Article Outline

INTRODUCTION
THE EBID MECHANISM
EXPERIMENT
1. Material
2. Deposition and characterization
RESULTS AND DISCUSSION
CONCLUSIONS

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KEYWORDS and PACS

Keywords

hydrogen, carbon fibres, amorphous state, electron beam deposition, thin films, transmission electron microscopy, electron energy loss spectra, Raman spectra, secondary ion mass spectra, indentation, nanostructured materials, chemical analysis, hardness, elastic moduli, tensile testing, atomic force microscopy, clamps

PACS

81.05.U-

Carbon/carbon-based materials
81.15.-z

Methods of deposition of films and coatings; film growth and epitaxy
68.55.A-

Nucleation and growth
81.40.Jj

Elasticity and anelasticity, stress-strain relations
81.40.Np

Fatigue, corrosion fatigue, embrittlement, cracking, fracture, and failure
62.20.M-

Structural failure of materials
62.20.Qp

Friction, tribology, and hardness
62.20.D-

Elasticity
68.60.Bs

Mechanical and acoustical properties
81.70.Bt

Mechanical testing, impact tests, static and dynamic loads
79.20.Rf

Atomic, molecular, and ion beam impact and interactions with surfaces
82.80.Ms

Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI)
79.20.Uv

Electron energy loss spectroscopy
78.35.+c

Brillouin and Rayleigh scattering; other light scattering
68.37.Ps

Atomic force microscopy (AFM)

ARTICLE DATA

Digital Object Identifier

http://dx.doi.org/10.1063/1.1940138

PUBLICATION DATA

ISSN

0021-8979 (print)

1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef

American Institute of Physics

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