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15 May 2005

Volume 97, Issue 10, Articles (10xxxx)

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back to top Thin Film Soft Magnetic Materials

Perpendicular anisotropy in granular Co–Zr–O films

Yuqin Sun, Weidong Li, Parul Dhagat, and Charles R. Sullivan

J. Appl. Phys. 97, 10N301 (2005); http://dx.doi.org/10.1063/1.1851711 (3 pages) | Cited 6 times

Online Publication Date: 17 May 2005

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Soft granular Co–M–O films have promise for application in high-frequency thin-film inductors. But granular Co-based films are often found with perpendicular anisotropy, which can result in stripe domains and poor hysteresis behavior. Film microstructure was analyzed for Co-rich Co–Zr–O granular films with and without stripe-domain behavior. It is suggested that perpendicular anisotropy originates from columnar structure with Co columns perpendicular to film plane. The appearance of columnar structure is determined by sputter pressure and oxygen content.
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75.50.Dd Nonmetallic ferromagnetic materials
75.70.Ak Magnetic properties of monolayers and thin films
75.70.Kw Domain structure (including magnetic bubbles and vortices)
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
75.30.Gw Magnetic anisotropy
68.35.B- Structure of clean surfaces (and surface reconstruction)
68.55.-a Thin film structure and morphology

Origin of the anisotropy in soft nanocrystalline FeTaCN films

Ruo-Fan Jiang and Chih-Huang Lai

J. Appl. Phys. 97, 10N302 (2005); http://dx.doi.org/10.1063/1.1851955 (3 pages) | Cited 4 times

Online Publication Date: 17 May 2005

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The magnetic anisotropy of the soft nanocrystalline FeTaCN film was mainly established by the residual stress. When the value of magnetoelastic anisotropy constant (KU) of FeTaCN films was positive and greater than a certain onset value of energy, the film exhibited an in-plane anisotropy and good soft magnetic properties. On the other hand, when the KU was negative, the perpendicular anisotropy appeared, accompanying the presence of stripe domains. The coercivity was reduced to 0.9 Oe after 250 °C annealing. However, the films became magnetically isotropic, which was attributed to the stress release during the annealing process.
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75.50.Dd Nonmetallic ferromagnetic materials
75.50.Tt Fine-particle systems; nanocrystalline materials
81.07.Bc Nanocrystalline materials
75.70.Ak Magnetic properties of monolayers and thin films
75.75.-c Magnetic properties of nanostructures
68.60.Bs Mechanical and acoustical properties
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
75.30.Gw Magnetic anisotropy
75.80.+q Magnetomechanical effects, magnetostriction
81.40.Jj Elasticity and anelasticity, stress-strain relations
75.60.Ch Domain walls and domain structure
62.25.-g Mechanical properties of nanoscale systems
81.40.Gh Other heat and thermomechanical treatments
62.20.D- Elasticity

Preparation of high moment CoFe films with controlled grain size and coercivity

M. Vopsaroiu, M. Georgieva, P. J. Grundy, G. Vallejo Fernandez, S. Manzoor, M. J. Thwaites, and K. O’Grady

J. Appl. Phys. 97, 10N303 (2005); http://dx.doi.org/10.1063/1.1855276 (3 pages) | Cited 14 times

Online Publication Date: 17 May 2005

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In this paper a preparation method for high moment CoFe thin films with soft magnetic properties is reported. A full control of coercivity in a series of 20-nm-thick CoFe films has been achieved without using seed layers, additives, or thermal annealing. The films were sputtered directly onto Si substrates and the coercivity was varied by changing the mean grain size in the sputtered films. The mean grain size was in turn controlled via the sputtering rate. A reduction in the coercivity has been observed from 120 Oe for samples with a mean grain size larger than 17 nm down to 12 Oe for a sample with a mean grain size of 7.2 nm. The results are in good agreement with the “random anisotropy model” relating the coercivity to the mean grain size in polycrystalline ferromagnetic films.
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75.50.Bb Fe and its alloys
81.05.Bx Metals, semimetals, and alloys
81.15.Cd Deposition by sputtering
75.70.Ak Magnetic properties of monolayers and thin films
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
75.30.Gw Magnetic anisotropy
75.30.Cr Saturation moments and magnetic susceptibilities
75.70.Kw Domain structure (including magnetic bubbles and vortices)
68.55.A- Nucleation and growth
68.55.-a Thin film structure and morphology

Development of high permeability nanocrystalline permalloy by electrodeposition

H. L. Seet, X. P. Li, Z. J. Zhao, Y. K. Kong, H. M. Zheng, and W. C. Ng

J. Appl. Phys. 97, 10N304 (2005); http://dx.doi.org/10.1063/1.1855712 (3 pages) | Cited 13 times

Online Publication Date: 17 May 2005

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In this study, for developing microsensors for weak magnetic field, methods for developing high permeability nanocrystalline permalloy by electrodeposition and the relationship between the grain size and magnetic properties of the nanocrystalline permalloy are investigated. By dc plating with and without saccharin added and pulse plating with saccharin added, permalloy samples of grain sizes from 52 nm to 11 nm are obtained. The coercivity and magnetoimpedance (MI) ratio of the samples are tested against the grain size variation. Results show that the coercivity decreases rapidly and MI ratio increases greatly with grain size decrease from 52 nm to 11 nm.
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75.50.Bb Fe and its alloys
81.07.Bc Nanocrystalline materials
75.75.-c Magnetic properties of nanostructures
81.15.Pq Electrodeposition, electroplating
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
75.47.Np Metals and alloys
81.05.Bx Metals, semimetals, and alloys
73.50.Jt Galvanomagnetic and other magnetotransport effects (including thermomagnetic effects)
61.46.-w Structure of nanoscale materials
75.50.Tt Fine-particle systems; nanocrystalline materials
81.16.-c Methods of micro- and nanofabrication and processing
68.65.-k Low-dimensional, mesoscopic, nanoscale and other related systems: structure and nonelectronic properties

Magnetic properties of electroplated nano/microgranular NiFe thin films for rf application

Y. Zhuang, M. Vroubel, B. Rejaei, J. N. Burghartz, and K. Attenborough

J. Appl. Phys. 97, 10N305 (2005); http://dx.doi.org/10.1063/1.1857391 (3 pages) | Cited 12 times

Online Publication Date: 17 May 2005

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A granular NiFe thin film with large in-plane magnetic anisotropy and high ferromagnetic-resonance frequency developed for radio-frequency integrated circuit (IC) applications is presented. During the deposition, three-dimensional (3D) growth occurs, yielding NiFe grains (ϕ ∼ 1.0 μm). Nanonuclei (ϕ ∼ 30–50 nm) are observed in single NiFe grains by atomic-force microscopy (AFM). The in-plane magnetic anisotropy is estimated to be ∼ 50 mT. The frequency-dependent complex permeability is extracted. By taking the NiFe film as a magnetic core, solenoid-type inductors are fabricated and demonstrated and show a high operating frequency ( ∼ 5.5 GHz) with a maximum quality factor ( ∼ 3).
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85.70.Kh Magnetic thin film devices: magnetic heads (magnetoresistive, inductive, etc.); domain-motion devices, etc.
84.32.Hh Inductors and coils; wiring
85.40.Qx Microcircuit quality, noise, performance, and failure analysis
75.70.Cn Magnetic properties of interfaces (multilayers, superlattices, heterostructures)
75.70.Ak Magnetic properties of monolayers and thin films
75.75.-c Magnetic properties of nanostructures
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
75.30.Gw Magnetic anisotropy
76.50.+g Ferromagnetic, antiferromagnetic, and ferrimagnetic resonances; spin-wave resonance
68.55.-a Thin film structure and morphology
68.55.A- Nucleation and growth
85.40.Sz Deposition technology
61.46.-w Structure of nanoscale materials
68.35.B- Structure of clean surfaces (and surface reconstruction)
81.16.-c Methods of micro- and nanofabrication and processing
68.37.Ps Atomic force microscopy (AFM)

Magnetomechanical properties of nanogranular Co–Fe–Al–O films

M. Pasquale, C. P. Sasso, A. Magni, F. Celegato, J. C. Sohn, and S. H. Lim

J. Appl. Phys. 97, 10N306 (2005); http://dx.doi.org/10.1063/1.1859213 (3 pages) | Cited 5 times

Online Publication Date: 17 May 2005

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Using different experimental techniques we analyze the interplay between the structure and the magnetomechanical behavior of soft nanogranular CoFeAlO films with thickness ranging from 125 to 550 nm. The sputtered film is characterized by 40-nm FeCo grains and a saturation magnetization of 16 kG. The results show that, due to the role of the mechanically stiff and insulating Al–O matrix, an increase of the resistivity leads to an increase of the anisotropy field and also of the ferromagnetic resonance frequency. The 125-nm-thick films possess the best combination of anisotropy field and resistivity leading to an estimated ferromagnetic resonance frequency around 1.9 GHz.
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75.50.Dd Nonmetallic ferromagnetic materials
75.80.+q Magnetomechanical effects, magnetostriction
75.70.Kw Domain structure (including magnetic bubbles and vortices)
75.70.Ak Magnetic properties of monolayers and thin films
75.30.Gw Magnetic anisotropy
76.50.+g Ferromagnetic, antiferromagnetic, and ferrimagnetic resonances; spin-wave resonance
73.61.Ng Insulators
68.37.Rt Magnetic force microscopy (MFM)

Effect of rapid thermal annealing on the structure and magnetic properties of chemical vapor deposition cobalt layers

N. Deo, M. F. Bain, J. H. Montgomery, and H. S. Gamble

J. Appl. Phys. 97, 10N307 (2005); http://dx.doi.org/10.1063/1.1862012 (3 pages) | Cited 1 time

Online Publication Date: 17 May 2005

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This paper presents the results obtained on cobalt layers after rapid thermal annealing in N2 ambient at temperatures between 525 and 800 °C. The cobalt layers were deposited by chemical vapor deposition from Co(CO)3NO on to oxidized-Si substrates at 450 °C. As the anneal temperature increases from 525 to 800 °C the percentage layer resistivity decrease goes from 35% to 55%. The lowest resistivity achieved was ∼ 11 μΩ cm for 300-nm-thick layers and ∼ 14 μΩ cm for 180-nm layer annealed in the range of 650–800 °C. XRD analysis shows that a mixture of fcc and hcp cobalt grains is present in the as-deposited material. As the annealing temperature increases the fcc Co peaks increase due to crystallization of the material. This was confirmed by surface and microstructure analysis using SEM and AFM. The grain size had significantly increased to 200–300 nm ranges for both 180- and 300-nm layers. From the hysteresis loops it was found that the coercivity values are significantly reduced to 25 Oe from 350 and 140 Oe due to high-temperature annealing to give soft magnetic property.
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75.50.Cc Other ferromagnetic metals and alloys
81.05.Bx Metals, semimetals, and alloys
75.70.Ak Magnetic properties of monolayers and thin films
81.40.Rs Electrical and magnetic properties related to treatment conditions
61.72.Cc Kinetics of defect formation and annealing
68.55.-a Thin film structure and morphology
73.61.At Metal and metallic alloys
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects
68.35.B- Structure of clean surfaces (and surface reconstruction)
68.55.A- Nucleation and growth
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
64.70.K- Solid-solid transitions
68.37.Ps Atomic force microscopy (AFM)
68.37.Hk Scanning electron microscopy (SEM) (including EBIC)
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