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15 Sep 2002

Volume 92, Issue 6, pp. 2959-3416

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Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric

Suzhu Yu, Terence K. S. Wong, Kantisara Pita, Xiao Hu, and Valeri Ligatchev

J. Appl. Phys. 92, 3338 (2002); http://dx.doi.org/10.1063/1.1499979 (7 pages) | Cited 16 times

Online Publication Date: 27 August 2002

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Silica mesoporous films with low dielectric constant were successfully fabricated by a multiple-step sol–gel process. Various surface modifications were conducted to make the surface of the films hydrophobicity, which was proved very effective to maintain the low dielectric properties of the films. The basic properties of the silica films were evaluated by atomic force microscopy, specular x-ray reflectivity, Fourier transform infrared, and thermal gravimetric and differential thermal analysis. An inherent low dielectric constant of around 2.0 was realized for about 56% porosity of the silica film with pore size less than 40 nm and the leakage current was at a level of 10−6 A/cm2 after two months of fabrication. Preliminary results of the silica films prepared here present a very positive prospective to intermetal dielectric applications. © 2002 American Institute of Physics.
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77.55.-g Dielectric thin films
81.10.Dn Growth from solutions
81.10.Fq Growth from melts; zone melting and refining
81.15.Lm Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)
81.05.Rm Porous materials; granular materials
78.30.-j Infrared and Raman spectra
77.84.-s Dielectric, piezoelectric, ferroelectric, and antiferroelectric materials
68.37.Ps Atomic force microscopy (AFM)
85.40.-e Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology

Stability of an electrodynamic suspension

Alexei V. Filatov, Eric H. Maslen, and George T. Gillies

J. Appl. Phys. 92, 3345 (2002); http://dx.doi.org/10.1063/1.1503174 (9 pages)

Online Publication Date: 27 August 2002

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Previously, the authors have described a method of dynamically stabilized noncontact electromagnetic suspension of rotating bodies. The method makes use of the dynamic interaction between stationary and rotating sets of conductors and permanent magnets. The validity of this method has been demonstrated by building and testing a prototype in which noncontact suspension of a 3.2 kg rotor was achieved when it rotates at speeds above 18 Hz. A stability condition for that method of suspension was obtained with certain simplifying assumptions. One of these assumptions was that the inductive component of the stationary conductors is negligible. Here, we present modified stability conditions which take the inductance of the stationary conductors into consideration. One of the predicted effects is that nonzero inductance may cause significant reduction of the minimum stable levitation speed. Consequently, careful choice of the electrical properties of the stationary coils may significantly enhance the performance of the suspension. © 2002 American Institute of Physics.
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41.90.+e Other topics in electromagnetism; electron and ion optics (restricted to new topics in section 41)
82.70.Kj Emulsions and suspensions
47.65.-d Magnetohydrodynamics and electrohydrodynamics
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