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J. Appl. Phys. 80, 440 (1996); http://dx.doi.org/10.1063/1.362745 (8 pages)
Raman spectroscopy on amorphous carbon films
(Received 5 December 1995; accepted 25 March 1996)
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KEYWORDS and PACS
Keywords
CARBON, THIN FILMS, AMORPHOUS STATE, RAMAN SPECTRA, HYDROGENATION, SPUTTERED MATERIALS
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References
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