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Journal of Applied Physics / Volume 78 / Issue 12

J. Appl. Phys. 78, 6967 (1995); http://dx.doi.org/10.1063/1.360464 (7 pages)

Two‐dimensional fluid simulation of expanding plasma sheaths

MunPyo Hong and G. A. Emmert

Department of Nuclear Engineering and Engineering Physics, University of Wisconsin, 1500 Johnson Drive, Madison, Wisconsin 53706

(Received 24 October 1994; accepted 30 August 1995)

The transient sheath expansion around square and cross‐shaped targets is simulated numerically with a two‐dimensional fluid model. The angular distribution of the ions impinging on the target surface and the nonuniformity of the incident ion dose are calculated. The incident ion dose peaks near, but not at, the convex corner and has a minimum at the concave corner. The dip of the dose profile at the convex corner is shown to be caused by the product of a decreasing normal velocity profile and an increasing ion density profile along the target surface from the center to the corner. © 1995 American Institute of Physics.

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KEYWORDS and PACS

Keywords

ANGULAR DISTRIBUTION, FLUID MODELS, ION DENSITY, ION IMPLANTATION, NUMERICAL SOLUTION, PLASMA EXPANSION, PLASMA SHEATH, PLASMA SIMULATION, TWO−DIMENSIONAL CALCULATIONS, VELOCITY DISTRIBUTION

PACS

  • 52.40.Hf

    Plasma-material interactions; boundary layer effects

  • 52.77.Bn

    Etching and cleaning

  • 52.77.Dq

    Plasma-based ion implantation and deposition

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.360464

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

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    References

    J. R. Conrad, U.S. Patent No. 4,764,394 (August 1988).

    J. R. Conrad, J. L. Radke, R. A. Dodd, F. J. Worzala, and N. C. Tran, J. Appl. Phys. 62, 4591 (1987JAPIAU000062000011004591000001).

    M. Widner, I. Alexeff, W. D. Jones, and K. E. Lonngren, Phys. Fluids 13, 2532 (1970PFLDAS000013000010002532000001).

    G. Andrews and R. H. Varey, Phys. Fluids 14, 339 (1971PFLDAS000014000002000339000001).

    J. R. Conrad, J. Appl. Phys. 62, 777 (1987JAPIAU000062000003000777000001).

    J. T. Scheuer, M. Shamim, and J. R. Conrad, J. Appl. Phys. 67, 1241 (1990JAPIAU000067000003001241000001).

    G. A. Emmert and M. A. Henry, J. Appl. Phys. 71, 113 (1992JAPIAU000071000001000113000001).

    M. Shamim, J. T. Scheuer, and J. R. Conrad, J. Appl. Phys. 69, 2904 (1991JAPIAU000069000005002904000001).

    T. E. Sheridan and M. J. Alport, Appl. Phys. Lett. 64, 1783 (1994APPLAB000064000014001783000001).


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