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Journal of Applied Physics / Volume 72 / Issue 3

J. Appl. Phys. 72, 1149 (1992); http://dx.doi.org/10.1063/1.351792 (5 pages)

Optical properties of amorphous C/diamond thin films

S. R. P. Silva1, G. A. J. Amaratunga1, and C. P. Constantinou2

1Engineering Department, Cambridge University, Cambridge CB2 1PZ, United Kingdom
2Cavendish Laboratory, Cambridge University, Cambridge CB3 0HE, United Kingdom

(Received 14 February 1992; accepted 13 April 1992)

Amorphous C/diamond films have been prepared by rf plasma enhanced vapor deposition from a CH4/Ar gas mixture. Infrared and optical‐ultraviolet absorption characteristics are reported and used to characterize the bonding and optical properties of these films. It has been found that the optical band gap is not related to the hydrogen content in the films and varies according to the dc self bias developed during deposition. The IR data show that the hydrogen in the a‐C/diamond films is associated with triply bonded sp1 carbon as in acetelyne. The optical band gap of the films can be varied from 1.2–4.0 eV.

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KEYWORDS and PACS

Keywords

AMORPHOUS SEMICONDUCTORS, OPTICAL PROPERTIES, CARBON, DIAMONDS, THIN FILMS, CHEMICAL VAPOR DEPOSITION, INFRARED SPECTRA, ULTRAVIOLET SPECTRA, ABSORPTION SPECTRA, HYDROGEN ADDITIONS

PACS

  • 78.66.-w

    Optical properties of specific thin films

  • 81.15.Gh

    Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.351792

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

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    References

    G. Amaratunga, A. Putnis, K. Clay, and W. Milne, Appl. Phys. Lett. 55, 634 (1989APPLAB000055000007000634000001).

    G. A. J. Amaratunga, S. R. P. Silva, and D. R. McKenzie, J. Appl. Phys. 70, 5374 (1991JAPIAU000070000010005374000001).

    Y. Lifshitz, S. R. Kasi, and J. W. Rabalis, Phys. Rev. Lett. 62, 1290 (1989).

    B. Dischler, A. Bubenzer, and P. Koidl, Appl. Phys. Lett. 42, 636 (1983APPLAB000042000008000636000001).

    D. Sunil, V. D. Vankar, and K. L. Chopra, J. Appl. Phys. 69, 3719 (1991JAPIAU000069000006003719000001).


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