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Journal of Applied Physics / Volume 68 / Issue 4

J. Appl. Phys. 68, 1825 (1990); http://dx.doi.org/10.1063/1.346617 (6 pages)

Determining thin film properties by fitting optical transmittance

J. D. Klein, A. Yen, and S. F. Cogan

EIC Laboratories, Norwood, Massachusetts 02062

(Received 5 April 1990; accepted 30 April 1990)

The optical transmission spectra of rf sputtered tungsten oxide films on glass substrates were modeled to determine absorption edge behavior, film thickness, and index of refraction. Removal of substrate reflection and absorption phenomena from the experimental spectra allowed direct examination of thin film optical characteristics. The interference fringe pattern allows determination of the film thickness and the dependence of the real index of refraction on wavelength. Knowledge of the interference fringe behavior in the vicinity of the absorption edge was found essential to unambiguous determination of the optical band gap. In particular, the apparently random deviations commonly observed in the extrapolation of as‐acquired data are eliminated by explicitly considering interference fringe phenomena. The multivariable optimization fitting scheme employed allows air‐film‐substrate reflection losses to be compensated without making reflectance measurements.

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KEYWORDS and PACS

Keywords

ABSORPTION EDGE, TUNGSTEN OXIDES, FILMS, GLASS, SUBSTRATES, OPTICAL PROPERTIES, SPUTTERING, LIGHT TRANSMISSION, SPECTRA, THICKNESS, REFRACTIVITY, INTERFERENCE, MATHEMATICAL MODELS

PACS

  • 78.66.-w

    Optical properties of specific thin films

  • 68.55.-a

    Thin film structure and morphology

  • 42.25.Bs

    Wave propagation, transmission and absorption

  • 81.40.Tv

    Optical and dielectric properties related to treatment conditions

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.346617

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

For access to fully linked references, you need to log in.
    X. Ying, A. Feldman, and E. N. Farabaugh, J. Appl. Phys. 67, 2056 (1990JAPIAU000067000004002056000001).

    H. Kaneko, K. Miyake, and Y. Teramoto, J. Appl. Phys. 53, 3070 (1982JAPIAU000053000004003070000001).

    S. F. Cogan, N. M. Nguyen, S. J. Perrotti, and R. D. Rauh, J. Appl. Phys. 66, 1333 (1989JAPIAU000066000003001333000001).

    S. F. Cogan, T. D. Plante, M. A. Parker, and R. D. Rauh, J. Appl. Phys. 60, 2735 (1986JAPIAU000060000008002735000001).

    C. R. Aita, Y.-L. Liu, M. L. Kao, and S. D. Hansen, J. Appl. Phys. 60, 749 (1986JAPIAU000060000002000749000001).


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