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J. Appl. Phys. 47, 353 (1976); http://dx.doi.org/10.1063/1.322325 (4 pages)
Determinations of oxide thicknesses on tritided erbium films using beta‐induced x‐ray fluorescence
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Add to FacebookFor a tritided erbium film, tritium‐decay betas induce characteristic x‐ray emission from the film, the Er2O3 oxide layer, and the substrate. Measurement of the beta‐induced x‐ray spectrum for x rays with energies between ∼0.3 and 8 keV using a windowless Si(Li) detector permitted evaluation of the O(Kα)/Er(Lα) intensity ratio. This ratio was correlated with the total oxygen surface density as determined using proton‐induced x rays from the same films, and the results have beeen compared to a theoretical model by Haggmark. A strong dependence of the O(Kα)/Er(Lα) ratio on Er2O3 areal density has been demonstrated for oxide thicknesses less than ∼300 Å.
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R. G. Musket and W. Bauer, J. Appl. Phys. 43, 4786 (1972)JAPIAU000043000011004786000001.
L. G. Haggmark, J. Appl. Phys., following paper, 47, 357 (1976)JAPIAU000047000001000357000001.
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