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14 Feb 2013

Volume 113, Issue 6, Articles (06xxxx)

Issue Cover Spotlight Figure

J. Appl. Phys. 113, 064301 (2013); http://dx.doi.org/10.1063/1.4789897 (11 pages)

Y. G. Marinov, G. B. Hadjichristov, A. G. Petrov, S. Marino, C. Versace, and N. Scaramuzza
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back to top Dielectrics and Ferroelectricity

Physical interpretation and separation of eddy current pulsed thermography

Aijun Yin, Bin Gao, Gui Yun Tian, W. L. Woo, and Kongjing Li

J. Appl. Phys. 113, 064101 (2013); http://dx.doi.org/10.1063/1.4790866 (8 pages)

Online Publication Date: 8 February 2013

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Eddy current pulsed thermography (ECPT) applies induction heating and a thermal camera for non-destructive testing and evaluation (NDT&E). Because of the variation in resultant surface heat distribution, the physical mechanism that corresponds to the general behavior of ECPT can be divided into an accumulation of Joule heating via eddy current and heat diffusion. However, throughout the literature, the heating mechanisms of ECPT are not given in detail in the above two thermal phenomena and they are difficult to be separated. Nevertheless, once these two physical parameters are separated, they can be directly used to detect anomalies and predict the variation in material properties such as electrical conductivity, magnetic permeability and microstructure. This paper reports physical interpretation of these two physical phenomena that can be found in different time responses given the ECPT image sequences. Based on the phenomenon and their behaviors, the paper proposes a statistical method based on single channel blind source separation to decompose the two physical phenomena using different stages of eddy current and thermal propagation from the ECPT images. Links between mathematical models and physical models have been discussed and verified. This fundamental understanding of transient eddy current distribution and heating propagation can be applied to the development of feature extraction and pattern recognition for the quantitative analysis of ECPT measurement images and defect characterization.
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81.70.Ex Nondestructive testing: electromagnetic testing, eddy-current testing
81.70.Fy Nondestructive testing: optical methods
02.70.Rr General statistical methods
42.30.Sy Pattern recognition
75.60.Ej Magnetization curves, hysteresis, Barkhausen and related effects

Effect of microwave plasma treatment on silicon dioxide films grown by atomic layer deposition at low temperature

T. Tanimura, Y. Watanabe, Y. Sato, Y. Kabe, and Y. Hirota

J. Appl. Phys. 113, 064102 (2013); http://dx.doi.org/10.1063/1.4790884 (5 pages)

Online Publication Date: 13 February 2013

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The effects of microwave plasma treatments on the physical and electrical characteristics of silicon dioxide films are discussed. Plasma treatments significantly improve the characteristics at low temperatures. Differences in the type of inert gas, O2 partial pressure, and total pressure cause differences in the plasma energy and active species concentrations, which affect reduction in the impurity concentrations, generation of dangling bonds, and effective working depth of the plasma. The changes in the electrical characteristics of the plasma-treated oxide films are consistent with those in the physical characteristics. The plasma conditions that result in the best improvements are determined.
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68.55.aj Insulators
52.77.Dq Plasma-based ion implantation and deposition
71.55.Ht Other nonmetals
73.61.Ng Insulators
81.15.Gh Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.)
61.72.sd Impurity concentration

Insulation degradation behavior of multilayer ceramic capacitors clarified by Kelvin probe force microscopy under ultra-high vacuum

Keigo Suzuki, Takafumi Okamoto, Hiroyuki Kondo, Nobuhiko Tanaka, and Akira Ando

J. Appl. Phys. 113, 064103 (2013); http://dx.doi.org/10.1063/1.4791714 (7 pages)

Online Publication Date: 13 February 2013

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We investigated surface potential images on the cross section of degraded multilayer ceramic capacitors (MLCCs) by Kelvin probe force microscopy measured under a dc bias voltage in ultra-high vacuum. A highly accelerated lifetime test (HALT) was conducted to obtain degraded MLCCs. The high energy resolution of the present measurement allows us to observe the step-like voltage drops on dielectric layers of as-fired MLCCs. The step-like voltage drops disappear on the dielectric layers of degraded MLCCs, indicating that the resistance at grain boundaries declines with the progress of insulation degradation. Furthermore, the electric field concentrations near the electrodes are clearly observed under forward and backward bias. The discussion based on energy band diagrams suggests that the electric field concentrations near electrodes are attributable to energy barrier formed at the interface between electrode and dielectrics. In particular, the electric field concentration at cathode in HALT measured under backward bias is much higher than that at anode in HALT measured under forward bias. This implies that oxygen vacancies accumulated during HALT cause band bending near the cathode in HALT. We propose that the initial decline of resistance at grain boundaries and following electric-field concentrations at anode in HALT is essential to the insulation degradation on dielectric layers of MLCCs under dc bias voltage.
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84.32.Tt Capacitors
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