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Journal of Applied Physics / Volume 111 / Issue 7 / PROCEEDINGS OF THE 56TH ANNUAL CONFERENCE ON MAGNETISM AND MAGNETIC MATERIALS / Ferrites, Garnets, and Microwave Materials

J. Appl. Phys. 111, 07A501 (2012); http://dx.doi.org/10.1063/1.3670061 (3 pages)

Skin effect suppression for Cu/CoZrNb multilayered inductor

Noriyuki Sato, Yasushi Endo, and Masahiro Yamaguchi

Department of Electrical and Communication Engineering, Graduate School of Engineering, Tohoku University, 6-6-05 Aoba, Aramaki, Aoba-ku, Sendai, 980-8579, Japan

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(Received 23 September 2011; accepted 5 October 2011; published online 6 February 2012)

The Cu/Co85Zr3Nb12 multilayer is studied as a conductor of a spiral inductor to suppress the skin effect at the 5 GHz range (matches IEEE 802.11 a standard) using negative-permeability in CoZrNb films beyond the ferromagnetic resonance frequency. The skin effect suppression becomes remarkable when the thickness of Cu in each period of the multilayer, tCu, is less than the skin depth of Cu at the targeting frequency. For the 5 GHz operation, tCu ≤ 750 nm. The resistance of the Cu/CoZrNb multilayered spiral inductor decreases as much as 8.7%, while keeping the same inductance of 1.1 nH as that of a similar air core. Accordingly, Q = 16. Therefore, the proposed method can contribute to realize a high-Q spiral inductor. We also study the potentially applicable frequency of this method. Given a soft magnetic material with Ms = 105 emu/cc and Hk = 5 Oe, the method can be applied at 700 MHz, the lowermost carrier frequency band for the 4th generation cellular phone system.

© 2012 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL PROCEDURES
  3. RESULTS AND DISCUSSION
    1. CPW
    2. Inductor
  4. NEED FOR LOW SATURATION MOMENT MATERIAL
  5. CONCLUSIONS

KEYWORDS, PACS, and IPC

Keywords

cobalt alloys, copper, electrical resistivity, ferromagnetic resonance, inductance, magnetic multilayers, magnetic permeability, magnetic thin films, magnetoresistive devices, niobium alloys, skin effect, soft magnetic materials, thin film inductors, zirconium alloys

PACS

  • 84.32.Hh

    Inductors and coils; wiring

  • 85.70.Kh

    Magnetic thin film devices: magnetic heads (magnetoresistive, inductive, etc.); domain-motion devices, etc.

International Patent Classification (IPC)

  • C22C16/00

    Alloys based on zirconium

  • C22C19/00

    Alloys based on nickel or cobalt

  • H01F1/12

    Of soft-magnetic materials

  • H01F10/00

    Thin magnetic films, e.g. of one-domain structure

  • H01F10/08

    Characterised by magnetic layers

  • H01F27/00

    Details of transformers or inductances, in general

  • H01L27/20

    Including piezo-electric components; Including electrostrictive components; Including magnetostrictive components

  • H01L27/22

    Including components using galvano-magnetic effects, e.g. hall effect; Using similar magnetic field effects

  • H01L41/00

    Piezo-electric elements in general; Electrostrictive elements in general; Magnetostrictive elements in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

  • H01L43/00

    Devices using galvano-magnetic or similar magnetic effects; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof

  • H01L43/08

    Magnetic-field-controlled resistors

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3670061

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    B. Rejaei and M. Vroubel, J. Appl. Phys. 96, 6863 (2004)JAPIAU000096000011006863000001.


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