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J. Appl. Phys. 111, 07A303 (2012); http://dx.doi.org/10.1063/1.3670511 (3 pages)
Structural studies of high-Ku metastable CoPt thin films with long-range order
(Received 8 September 2011; accepted 12 October 2011; published online 8 February 2012)
© 2012 American Institute of Physics
KEYWORDS, PACS, and IPC
Keywords
cobalt alloys, high-k dielectric thin films, long-range order, metallic thin films, platinum alloys, sputter deposition
PACS
ARTICLE DATA
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