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Journal of Applied Physics / Volume 108 / Issue 9 / ARTICLES / Plasmas and Electrical Discharges

J. Appl. Phys. 108, 093302 (2010); http://dx.doi.org/10.1063/1.3486220 (11 pages)

Plasma diagnostics for investigating extreme ultraviolet light sources

P. Yeates1, J. White2, and E. T. Kennedy3

1National Centre for Plasma Science and Technology (NCPST), Dublin City University, Glasnevin, Dublin, Leinster 01, Ireland
2School of Physics, UCD, Belfield, Ireland
3School of Physical Sciences, Dublin City University, Glasnevin, Dublin, Leinster 01, Ireland

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(Received 30 June 2010; accepted 5 August 2010; published online 3 November 2010)

Plasma temperature and density diagnostics are crucial for lithographic applications of extreme ultraviolet light sources. One widely used technique employs line intensity ratios of successively charged ion states to determine the ion temperature (Tionz). This work comprises a detailed “stress-test” of the applied technique, where space and time resolved emission in laser-produced plasmas were studied, using a Nd:yttrium aluminum garnet laser pulse incident on an aluminum target in the 26.5–32.5 nm range. Detailed hydrodynamic simulations also investigate the dependency of ion temperature on electron density and the charge states for various line combinations (Al VI/V, Al VII/VI, Al VIII/VII, Al IX/VIII, and Al X/IX).

© 2010 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL
  3. IONIZATION TEMPERATURE (Tionz)
  4. PLASMA SIMULATION AND Ne DETERMINATION
  5. TEMPERATURE DIAGNOSTICS
    1. Tionz dependency on Ne
    2. Tionz charge dependency
  6. OPACITY INVESTIGATIONS
  7. CONCLUSION

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KEYWORDS and PACS

Keywords

plasma density, plasma diagnostics, plasma flow, plasma production by laser, plasma temperature

PACS

  • 52.70.Kz

    Optical (ultraviolet, visible, infrared) measurements

  • 52.25.-b

    Plasma properties

  • 52.50.Jm

    Plasma production and heating by laser beams (laser-foil, laser-cluster, etc.)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3486220

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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