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Journal of Applied Physics / Volume 108 / Issue 4 / ARTICLES / Interdisciplinary and General Physics

J. Appl. Phys. 108, 044902 (2010); http://dx.doi.org/10.1063/1.3462500 (6 pages)

Thermal conductivity of pure silica MEL and MFI zeolite thin films

Thomas Coquil1, Christopher M. Lew2, Yushan Yan2, and Laurent Pilon1

1Department of Mechanical and Aerospace Engineering, Henry Samueli School of Engineering and Applied Science, University of California–Los Angeles, 420 Westwood Plaza, Los Angeles, California 90095, USA
2Department of Chemical and Environmental Engineering, Bourns College of Engineering, University of California–Riverside, Riverside, California 92521-0403, USA

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(Received 4 March 2010; accepted 12 June 2010; published online 16 August 2010)

This paper reports the room temperature cross-plane thermal conductivity of pure silica zeolite (PSZ) MEL and MFI thin films. PSZ MEL thin films were prepared by spin coating a suspension of MEL nanoparticles in 1-butanol solution onto silicon substrates followed by calcination and vapor-phase silylation with trimethylchlorosilane. The mass fraction of nanoparticles within the suspension varied from 16% to 55%. This was achieved by varying the crystallization time of the suspension. The thin films consisted of crystalline MEL nanoparticles embedded in a nonuniform and highly porous silica matrix. They featured porosity, relative crystallinity, and MEL nanoparticles size ranging from 40% to 59%, 23% to 47% and 55 nm to 80 nm, respectively. PSZ MFI thin films were made by in situ crystallization, were b-oriented, fully crystalline, and had a 33% porosity. Thermal conductivity of these PSZ thin films was measured at room temperature using the 3ω method. The cross-plane thermal conductivity of the MEL thin films remained nearly unchanged around 1.02±0.10 W m−1 K−1 despite increases in (i) relative crystallinity, (ii) MEL nanoparticle size, and (iii) yield caused by longer nanoparticle crystallization time. Indeed, the effects of these parameters on the thermal conductivity were compensated by the simultaneous increase in porosity. PSZ MFI thin films were found to have similar thermal conductivity as MEL thin films even though they had smaller porosity. Finally, the average thermal conductivity of the PSZ films was three to five times larger than that reported for amorphous sol-gel mesoporous silica thin films with similar porosity and dielectric constant.

© 2010 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. METHOD AND EXPERIMENTS
    1. Sample film preparation
    2. Film characterization
    3. Thermal conductivity measurements
  3. RESULTS AND DISCUSSION
    1. Effect of film thickness
    2. Effect of second stage synthesis time
    3. Comparison between PSZ MEL and PSZ MFI films
    4. Comparison with sol-gel templated mesoporous SiO2 films
    5. Comparison of thermal and dielectric properties
  4. CONCLUSION

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KEYWORDS and PACS

Keywords

calcination, crystallisation, nanofabrication, nanoparticles, porosity, silicon compounds, spin coating, suspensions, thermal conductivity, thin films, zeolites

PACS

  • 66.70.-f

    Nonelectronic thermal conduction and heat-pulse propagation in solids; thermal waves

  • 68.55.-a

    Thin film structure and morphology

  • 81.15.Lm

    Liquid phase epitaxy; deposition from liquid phases (melts, solutions, and surface layers on liquids)

  • 61.46.Df

    Structure of nanocrystals and nanoparticles ("colloidal" quantum dots but not gate-isolated embedded quantum dots)

  • 81.16.-c

    Methods of micro- and nanofabrication and processing

  • 82.70.Kj

    Emulsions and suspensions

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3462500

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

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    References

    K. Maex, M. R. Baklanov, D. Shamiryan, F. Iacopi, S. H. Brongersma, and Z. S. Yanovit-skaya, J. Appl. Phys. 93, 8793 (2003)JAPIAU000093000011008793000001.

    Y. Hudiono, A. Greenstein, C. Saha-Kuete, B. Olson, S. Graham, and S. Nair, J. Appl. Phys. 102, 053523 (2007)JAPIAU000102000005053523000001.

    T. Coquil, E. K. Richman, N. Hutchinson, S. H. Tolbert, and L. Pilon, J. Appl. Phys. 106, 034910 (2009)JAPIAU000106000003034910000001.

    D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990)RSINAK000061000002000802000001.

    S. M. Lee and D. G. Cahill, J. Appl. Phys. 81, 2590 (1997)JAPIAU000081000006002590000001.

    T. Yamane, N. Nagai, S. I. Katayama, and M. Todoki, J. Appl. Phys. 91, 9772 (2002)JAPIAU000091000012009772000001.

    C. Hu, M. Morgen, P. S. Ho, A. Jain, W. N. Gill, J. L. Plawsky, and P. C. Wayner, Appl. Phys. Lett. 77, 145 (2000)APPLAB000077000001000145000001.

    R. Prasher, J. Appl. Phys. 100, 064302 (2006)JAPIAU000100000006064302000001.

    J. L. Feldman, M. D. Kluge, P. B. Allen, and F. Wooten, Phys. Rev. B 48, 12589 (1993).


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