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J. Appl. Phys. 108, 043302 (2010); http://dx.doi.org/10.1063/1.3467770 (8 pages)

Optimization of La0.7Ba0.3MnO3−δ complex oxide laser ablation conditions by plume imaging and optical emission spectroscopy

S. Amoruso1,2, C. Aruta2, R. Bruzzese1,2, D. Maccariello1, L. Maritato2,3, F. Miletto Granozio2, P. Orgiani2,3, U. Scotti di Uccio1,2, and X. Wang2

1Dipartimento di Scienze Fisiche, Università degli Studi di Napoli Federico II, Complesso Universitario di Monte S. Angelo, Via Cintia, I-80126 Napoli, Italy
2CNR–SPIN, Complesso Universitario di Monte S. Angelo, Via Cintia, I-80126 Napoli, Italy
3Dipartimento di Matematica e Informatica, Università degli Studi di Salerno, I-84081 Baronissi (SA), Italy

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(Received 15 April 2010; accepted 28 June 2010; published online 18 August 2010)

The properties of thin films of complex oxides, such as La1−xDxMnO3−δ (D = Ba, Ca, Sr, etc.), produced by pulsed laser deposition depend critically on the experimental parameters in which laser ablation is carried out. Here, we report a comparative analysis of the pulsed laser ablation process of La0.7Ba0.3MnO3−δ, in oxygen background, in the ambient pressure range from 10−2 to 1 mbar, typically employed in pulsed laser deposition of manganites. The laser ablation plume was studied by using time-gated imaging and optical emission spectroscopy techniques. It was found that at a pressure of ≈ 10−2 mbar, the plume species arriving at the substrate are characterized by hyperthermal kinetic energy ( ≈ 10 eV), and high degree of excitation. On the contrary, at larger oxygen pressure (0.1–1 mbar), the velocity of plume species reaching the substrate, and their degree of excitation are much reduced by the confining effects of the background gas. These features explain why an appropriate choice of the experimental conditions in which the deposition process is carried out leads to better quality films, providing helpful indications to improve control over the growth process of both La1−xDxMnO3−δ and other perovskitic oxides.

© 2010 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL METHODS
  3. RESULTS AND DISCUSSION
    1. PLA of LBMO: effect of the background oxygen at Ts = 670 °C
    2. PLA of LBMO: Effect of the substrate temperature on the plume propagation, at Pg = 2×10−2 mbar
    3. PLA of LBMO: Effect of the laser pulse fluence on the plume propagation, at Pg = 2×10−2 mbar
  4. CONCLUSIONS

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0021-8979 (print)  
1089-7550 (online)

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