jap banner
  • Volume/Page
  • Keyword
  • DOI
  • Citation
  • Advanced
   
 
 
 

Flickr Twitter UniPHY Group iResearch App Facebook

Journal of Applied Physics / Volume 108 / Issue 4 / SPECIAL TOPIC: INVITED PAPERS FROM THE INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS, AVEIRO, PORTUGAL, 2009

J. Appl. Phys. 108, 042005 (2010); http://dx.doi.org/10.1063/1.3474960 (4 pages)

Individual switching of film-based nanoscale epitaxial ferroelectric capacitors

Yunseok Kim1, Hee Han2, Brian J. Rodriguez1, Ionela Vrejoiu1, Woo Lee3, Sunggi Baik2, Dietrich Hesse1, and Marin Alexe1

1Max Planck Institute of Microstructure Physics, D-06120 Halle (Saale), Germany
2Department of Materials Science and Engineering, Pohang University of Science and Technology (POSTECH), Pohang 790-784, Republic of Korea
3Korea Research Institute of Standards and Science (KRISS), Yuseong, 305-340 Daejeon, Republic of Korea

View MapView Map

(Received 5 October 2009; accepted 22 April 2010; published online 31 August 2010)

We have investigated the individual switching of nanoscale capacitors by piezoresponse force microscopy. Nanoscale epitaxial ferroelectric capacitors with terabyte per inch square equivalent density were fabricated by the deposition of top electrodes onto a pulsed laser deposited lead zirconate titanate thin film by electron beam evaporation through ultrathin anodic aluminum oxide membrane stencil masks. Using bias pulses, the nanoscale capacitors were uniformly switched and proved to be individually addressable. These film-based nanoscale capacitors might be a feasible alternative for high-density mass storage memory applications with near terabyte per inch square density due to the absence of any cross-talk effects.

© 2010 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENT
  3. RESULTS AND DISCUSSION
  4. SUMMARY

RELATED DATABASES

To view database links for this article, you need to log in.

KEYWORDS and PACS

Keywords

atomic force microscopy, capacitor switching, electrodes, electron beam deposition, epitaxial layers, ferroelectric capacitors, pulsed laser deposition

PACS

  • 85.50.-n

    Dielectric, ferroelectric, and piezoelectric devices

  • 84.32.Tt

    Capacitors

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3474960

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
    J. F. Scott and C. A. Paz de Araujo, Science 246, 1400 (1989)PHTOAD000051000007000022000001.

    O. Auciello, J. F. Scott, and R. Ramesh, Phys. Today 51(7), 22 (1998)PHTOAD000051000001000022000001.

    A. Gruverman, D. Wu, and J. F. Scott, Phys. Rev. Lett. 100, 097601 (2008).

    M. Alexe, C. Harnagea, D. Hesse, and U. Gösele, Appl. Phys. Lett. 75, 1793 (1999)APPLAB000075000012001793000001.

    A. Stanishevsky, B. Nagaraj, J. Melngailis, R. Ramesh, L. Khriachtchev, and E. McDaniel, J. Appl. Phys. 92, 3275 (2002)JAPIAU000092000006003275000001.

    T. Sun, Z. Pan, V. P. Dravid, Z. Wang, M. -F. Yu, and J. Wang, Appl. Phys. Lett. 89, 163117 (2006)APPLAB000089000016163117000001.

    S. Bühlmann, P. Muralt, and S. Von Allmen, Appl. Phys. Lett. 84, 2614 (2004)APPLAB000084000014002614000001.

    A. P. Li, F. Müller, A. Birner, K. Nielsch, and U. Gösele, J. Appl. Phys. 84, 6023 (1998)JAPIAU000084000011006023000001.

    J. -Z. Bao and C. C. Davis, Phys. Rev. E 47, 3670 (1993).

    J. Woo, S. Hong, D. K. Min, H. Shin, and K. No, Appl. Phys. Lett. 80, 4000 (2002)APPLAB000080000021004000000001.

    A. N. Morozovska, S. V. Svechnikov, E. A. Eliseev, and S. V. Kalinin, Phys. Rev. B 76, 054123 (2007).


For access to citing articles, you need to log in.


Figures (7)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)



Close

Google Calendar

ADVERTISEMENT

Your Recent History Recent History Help

Recently Viewed

  1. Individual switching of film-based nanoscale epitaxial ferroelectric capacitors
  2. Piezoresponse force microscopy investigations of Aurivillius phase thin films
  3. Drive frequency dependent phase imaging in piezoresponse force microscopy
  4. Lateral piezoelectric response across ferroelectric domain walls in thin films
  5. Correlation of electron backscatter diffraction and piezoresponse force microscopy for the nanoscale characterization of ferroelectric domains in polycrystalline lead zirconate titanate
Go to AIP Home
Copyright © American Institute of Physics
close