Micron-focused ion beamlets

Chowdhury, Abhishek; Bhattacharjee, Sudeep

doi:doi:10.1063/1.3371688

Volume/Page
Keyword
DOI
Citation
Advanced

Volume: Page/Article:

Search Content Type

article doi:

Citation:

Journal of Applied Physics / Volume 107 / Issue 9 / ARTICLES / Plasmas and Electrical Discharges

Previous Article | Next Article

LOG IN or SELECT A PURCHASE OPTION:

Buy PDF

Rent Article

Permissions / Reprints

J. Appl. Phys. 107, 093307 (2010); http://dx.doi.org/10.1063/1.3371688 (5 pages)

Micron-focused ion beamlets

Abhishek Chowdhury and Sudeep Bhattacharjee

Department of Physics, Indian Institute of Technology, Kanpur 208016, India

View Map

(Received 23 October 2009; accepted 25 February 2010; published online 10 May 2010)

Alerts
- Alert Me When Cited
- Alert Me When Corrected
Tools
Share
- Email Abstract
- Connotea
- CiteULike
- del.icio.us
- BibSonomy
- Tweet this Article
- Add to Facebook

Abstract

References (28)

Citing Articles (2)

Article Objects (7)

Related Content

A multiple beam electrode system (MBES) is used to provide focused ion beamlets of elements from a compact microwave plasma. In this study, a honeycomb patterned plasma electrode with micron size apertures for extracting ion beamlets is investigated. The performance of the MBES is evaluated with the help of two widely adopted and commercially available beam simulation tools, AXCEL-INP and SIMION, where the input parameters are obtained from our experiments. A simple theoretical model based upon electrostatic ray optics is employed to compare the results of the simulations. It is found that the results for the beam focal length agree reasonably well. Different geometries are used to optimize the beam spot size and a beam spot ∼ 5–10 μm is obtained. The multiple ion beamlets will be used to produce microfunctional surfaces on soft matter like polymers. Additionally, the experimental set-up and plans are presented in the light of above applications.

Article Outline

INTRODUCTION
SCHEMATIC OF SYSTEM
PERFORMANCE OF MBES
1. AXCEL-INP and SIMION simulations
  1. A simple through aperture
  2. Slotted aperture
2. Analytical model
RESULTS
1. A simple through aperture
2. Slotted aperture
DISCUSSIONS AND SUMMARY

RELATED DATABASES

To view database links for this article, you need to log in.

KEYWORDS and PACS

Keywords

electrodes, focused ion beam technology, plasma simulation, plasma-beam interactions

PACS

29.25.Ni

Ion sources: positive and negative
41.85.Ar

Particle beam extraction, beam injection
52.40.Mj

Particle beam interactions in plasmas
52.65.-y

Plasma simulation

ARTICLE DATA

Digital Object Identifier

http://dx.doi.org/10.1063/1.3371688

PUBLICATION DATA

ISSN

0021-8979 (print)

1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef

American Institute of Physics

For access to fully linked references, you need to log in.

View in Separate Window/Tab pop up window icon

Selected: Export Citations | Add to MyArticles

Appl. Phys. Lett. 85, 6206 (2004)APPLAB000085000025006206000001

Rev. Sci. Instrum. 71, 722 (2000)RSINAK000071000002000722000001

Rev. Sci. Instrum. 74, 2288 (2003)RSINAK000074000004002288000001

Rev. Sci. Instrum. 79, 063504 (2008)RSINAK000079000006063504000001

Appl. Phys. Lett. 91, 041503 (2007)APPLAB000091000004041503000001

J. Appl. Phys. 105, 096101 (2009)JAPIAU000105000009096101000001

Rev. Sci. Instrum. 70, 3332 (1999)RSINAK000070000008003332000001

Rev. Sci. Instrum. 67, 769 (1996)RSINAK000067000003000769000001

Phys. Plasmas 15, 123502 (2008)PHPAEN000015000012123502000001

For access to citing articles, you need to log in.

Figures (7)

Access to article objects (figures, tables, multimedia) requires a subscription; log in to view available files.
(Access to supplementary files, where available, is free for this journal.)