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Journal of Applied Physics / Volume 107 / Issue 5 / ARTICLES / Nanoscale Science and Design

J. Appl. Phys. 107, 054309 (2010); http://dx.doi.org/10.1063/1.3310420 (8 pages)

Modeling metallic nanoparticle synthesis in a magnetron-based nanocluster source by gas condensation of a sputtered vapor

E Quesnel, E Pauliac-Vaujour, and V Muffato

CEA-G/DRT/LITEN/DTNM, rue des Martyrs, 38054 Grenoble Cedex 9, France

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(Received 18 September 2009; accepted 17 January 2010; published online 4 March 2010)

Copper nanoparticles (NPs) were synthesized by inert-gas condensation of a sputtered metallic vapor using a dedicated commercial reactor. By controlling the time of residence of NPs in the carrier gas phase via the tuning of the collision path length, Cu NPs were produced. They exhibit various and well controlled diameters (3–10 nm) and a relatively narrow size dispersion. On the basis of these experimental results, a detailed modeling of NP nucleation and growth based on the classical nucleation theory was developed. It takes into account the peculiar geometry and thermal profile of the NP reactor. The simulated curves, calculated by a MATLAB® program developed for that purpose, exhibit a good qualitative agreement with experiment. Moreover, they highlight the role of process parameters and the strong influence of the reactor temperature profile on the NP size distribution. In the future, such calculations could be used for the optimization of the NP source design in order to increase its efficiency and reproducibility.

© 2010 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. EXPERIMENTAL PROCEDURES AND RESULTS
  3. NP SYNTHESIS MODEL
    1. NP Nucleation
    2. NP growth
    3. NP size distribution
    4. Contribution of the carrier gas (“Pressure effect”)
  4. RESULTS AND DISCUSSION
  5. CONCLUSION

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KEYWORDS and PACS

Keywords

copper, metal clusters, nanofabrication, nanoparticles, particle size, sputter deposition

PACS

  • 81.16.-c

    Methods of micro- and nanofabrication and processing

  • 81.05.Bx

    Metals, semimetals, and alloys

  • 81.15.Cd

    Deposition by sputtering

  • 61.46.Df

    Structure of nanocrystals and nanoparticles ("colloidal" quantum dots but not gate-isolated embedded quantum dots)

ARTICLE DATA

Digital Object Identifier
http://dx.doi.org/10.1063/1.3310420

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

Publisher

$abstract.society.value is a Member of CrossRef American Institute of Physics

For access to fully linked references, you need to log in.
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