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J. Appl. Phys. 102, 074913 (2007); http://dx.doi.org/10.1063/1.2786050 (8 pages)

Growth of m-plane GaN quantum wires and quantum dots on m-plane 6H-SiC

B. Amstatt1, J. Renard2, C. Bougerol2, E. Bellet-Amalric2, B. Gayral2, and B. Daudin2

1CEA-CNRS Group “Nanophysique et Semiconducteurs,” Institut Néel/CNRS, Univ. J. Fourier, 25 Avenue des Martyrs, BP 166, 38042 Grenoble Cedex 9, France; CEA Grenoble, Département de Recherche Fondamentale sur la Matière Condensée, SP2M, 17 Rue des Martyrs, 38054 Grenoble, France; and NOVASiC, Savoie Technolac, Arche Bât.4, BP 267, 73375 Le Bourget du Lac Cedex, France
2CEA-CNRS Group “Nanophysique et Semiconducteurs,” Institut Néel/CNRS, Univ. J. Fourier, 25 Avenue des Martyrs, BP 166, 38042 Grenoble Cedex 9, France and CEA Grenoble, Département de Recherche Fondamentale sur la Matière Condensée, SP2M, 17 Rue des Martyrs, 38054 Grenoble, France

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(Received 25 June 2007; accepted 8 August 2007; published online 10 October 2007)

Growth of m-plane GaN quantum nanostructures on an AlN buffer layer on m-plane SiC is investigated. GaN nanostructures with different shapes are obtained depending on the AlN buffer layer thickness and the amount of GaN deposited. For AlN buffer layer below 300 nm, GaN quantum wires, elongated perpendicularly to the c axis, are obtained independently of the amount of GaN deposited. For buffer layer thickness above 300 nm, and for an amount of GaN below (above) 5 ML (monolayer), GaN quantum dots (wires) are obtained. The difference in m-plane GaN morphology is related to the buffer layer stress state and to the anisotropic surface diffusion of m-plane GaN. Optical properties suggest an absence of internal quantum confined Stark effect.

© 2007 American Institute of Physics

Article Outline

  1. INTRODUCTION
  2. RESULTS
    1. Growth conditions
    2. AFM measurements
    3. RHEED results
    4. X-ray diffraction measurements
    5. Transmission electron microscopy studies
    6. Optical studies
  3. DISCUSSION AND CONCLUSION

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KEYWORDS and PACS

PACS

  • 68.65.La

    Quantum wires (patterned in quantum wells)

  • 68.65.Hb

    Quantum dots (patterned in quantum wells)

  • 68.35.Fx

    Diffusion; interface formation

  • 68.35.B-

    Structure of clean surfaces (and surface reconstruction)

ARTICLE DATA

PUBLICATION DATA

ISSN

0021-8979 (print)  
1089-7550 (online)

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