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1 Jul 2007

Volume 102, Issue 1, Articles (01xxxx)

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J. Appl. Phys. 102, 011301 (2007); http://dx.doi.org/10.1063/1.2750414 (22 pages)

S. N. Piramanayagam
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Nonlinear effects in collision cascades and high energy shock waves during ta-C:H growth

F. Piazza, O. Resto, and G. Morell

J. Appl. Phys. 102, 013301 (2007); http://dx.doi.org/10.1063/1.2751079 (8 pages) | Cited 3 times

Online Publication Date: 2 July 2007

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The surface topography of hydrogenated tetrahedral amorphous carbon (ta-C:H) is critical for various applications such as microelectromechanical devices, magnetic and optical storage devices, and medical implants. The surface topography of ta-C:H films deposited by distributed electron cyclotron resonance plasma from C2H2 gas precursor was investigated. The effects of pressure, together with ion flux and energy, are studied by atomic force microscopy in relation to the structural evolution of the films. The results are compared with the predictions of the Edward-Wilkinson model [ Proc. R. Soc. London, Ser. A 44, 1039 (1966) ] recently proposed to account for ta-C:H growth and with previous interpretations based on hypersonic shock waves. The random hillocks observed on the smooth surfaces of ta-C:H films deposited at high pressure are thought to result from the interference of high energy shock waves triggered by C4Hx+ ions that produce overlapping collision cascades and induce nonlinear effects.
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68.35.B- Structure of clean surfaces (and surface reconstruction)
68.37.Ps Atomic force microscopy (AFM)
62.50.-p High-pressure effects in solids and liquids
52.77.-j Plasma applications

Diagnostics of surface wave excited Kr/O2 plasma for low-temperature oxidation processes

Keigo Takeda, Yoshiki Kubota, Seigo Takashima, Masaru Hori, Anna Serdyuchenko, Masafumi Ito, and Yutaka Matsumi

J. Appl. Phys. 102, 013302 (2007); http://dx.doi.org/10.1063/1.2752549 (6 pages) | Cited 6 times

Online Publication Date: 9 July 2007

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The characteristics of species in Kr/O2 mixture surface wave excited plasmas have been studied for clarifying the mechanism of plasma oxidation process. The absolute densities of the ground-state oxygen atom (3Pj = 0,1,2) and the metastable oxygen atom (1D2) were measured by using vacuum ultraviolet absorption spectroscopy. Under a microwave power of 1 kW and a total pressure of 90 Pa, the absolute density of O(3Pj) atom decreased from 2×1014 to 3×1013 cm−3 with increasing Kr dilution ratio from 80 to 99%. However, the absolute density of O(1D2) atom increased with the increase of Kr dilution ratio and had a peak at a high Kr dilution condition of 97%. The production mechanisms of O(3Pj) and O(1D2) atoms have been discussed on the results of the metastable Kr atom density, the electron density, and electron temperature measured by near-infrared absorption spectroscopy and Langmuir singe probe, respectively. Moreover, we have measured the characteristics of positive ions by using quadrupole mass spectroscopy. From these results, the bombardments of O2+ ions with low energy seem to affect the Si oxidation with oxygen atoms.
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52.70.Kz Optical (ultraviolet, visible, infrared) measurements
52.70.Ds Electric and magnetic measurements
52.25.-b Plasma properties
82.33.Xj Plasma reactions (including flowing afterglow and electric discharges)
82.80.Ms Mass spectrometry (including SIMS, multiphoton ionization and resonance ionization mass spectrometry, MALDI)

A decontamination study of simulated chemical and biological agents

Han S. Uhm, Han Y. Lee, Yong C. Hong, Dong H. Shin, Yun H. Park, Yi F. Hong, and Chong K. Lee

J. Appl. Phys. 102, 013303 (2007); http://dx.doi.org/10.1063/1.2752544 (9 pages) | Cited 3 times

Online Publication Date: 9 July 2007

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A comprehensive decontamination scheme of the chemical and biological agents, including airborne agents and surface contaminating agents, is presented. When a chemical and biological attack occurs, it is critical to decontaminate facilities or equipments to an acceptable level in a very short time. The plasma flame presented here may provide a rapid and effective elimination of toxic substances in the interior air in isolated spaces. As an example, a reaction chamber, with the dimensions of a 22 cm diameter and 30 cm length, purifies air with an airflow rate of 5000 l/min contaminated with toluene, the simulated chemical agent, and soot from a diesel engine, the simulated aerosol for biological agents. Although the airborne agents in an isolated space are eliminated to an acceptable level by the plasma flame, the decontamination of the chemical and biological agents cannot be completed without cleaning surfaces of the facilities. A simulated sterilization study of micro-organisms was carried out using the electrolyzed ozone water. The electrolyzed ozone water very effectively kills endospores of Bacillus atrophaeus (ATCC 9372) within 3 min. The electrolyzed ozone water also kills the vegetative micro-organisms, fungi, and virus. The electrolyzed ozone water, after the decontamination process, disintegrates into ordinary water and oxygen without any trace of harmful materials to the environment.
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52.77.-j Plasma applications
52.75.Hn Plasma torches
82.45.Hk Electrolysis
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